SEMI Evaluation

Demonstrate your products conformance to SEMI standards

Semiconductor Equipment and Materials International (SEMI) is a global industry association that represents the architects of the electronics revolution. Its members come from all key sectors of the semiconductor Industry.

The Environmental Health and Safety (EHS) Committee within SEMI's International Standards Division develops industry standards and guidelines. These are accepted worldwide as providing advanced process equipment safety to an industry that demands quality products.

The flagship guideline in SEMI's fleet of safety documents is SEMI S2, Safety Guidelines for Semiconductor Manufacturing Equipment.

SEMI S2 defines minimum performance-based safety requirements for your products. It covers potential health and safety hazards. Mechanical, electrical and chemical. Ionising and non-ionising radiation. Seismic, ventilation, environmental and ergonomics.

There are many additional SEMI guidelines that are referenced by or otherwise support SEMI S2. More are on the way.

Our services at a glance

• In many instances your customer may contractually require conformance to the SEMI S2 guideline. Recently, where no other appropriate guidelines exist, conformance of equipment to portions of the SEMI S2 guideline have been required by some municipal authorities as a means to ensure equipment meets electrical and fire safety requirements.
• TÜV SÜD has the expertise and experience to provide you with industry-accepted equipment assessment services and reports for SEMI S2 and related guidelines.
• In addition to offering complete reports based on equipment testing, inspection and document review, we can provide you with our TÜV SÜD SEMI Mark, a third-party certification mark demonstrating your equipment has met the guideline requirements. This allows your end user to not only quickly identify that a machine has been evaluated, but that it has been evaluated by one of the most recognised names in product safety.
• Our services for SEMI services range from technical advice, evaluation, testing, certification and training to keep up to date with the latest revision.